< back to main site

Publications

Ultrathin Sio2 on Si. I quantifying and removing carbonaceous contamination.

Seah, M P; Spencer, S J (2003) Ultrathin Sio2 on Si. I quantifying and removing carbonaceous contamination. J. Vac. Sci. Technol. A, 21 (2). pp. 345-352.

Full text not available from this repository.

Abstract

No abstract available

Item Type: Article
Subjects: Analytical Science
Analytical Science > Trace Analysis and Electrochemistry
Last Modified: 23 Jul 2018 12:45
URI: http://eprintspublications.npl.co.uk/id/eprint/2598

Actions (login required)

View Item View Item