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Towards a standardisation roadmap for micro-systems technology: review of the MEMSTAND survey.

Leach, R K; Lewis, A; Singleton, L*; Cui, Z* (2003) Towards a standardisation roadmap for micro-systems technology: review of the MEMSTAND survey. In: Proceedings of euspen "Transferring Micro-systems Technology though the Commercial Markets"., 14-15 April 2003, NPL,UK.

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Abstract

This paper presents the results of a survey undertaken for the European Framework 5 project MEMSTAND. The focus of this project is to establish a roadmap for the pre-normative research effort into standardisation for microsystems technology (MST) in Europe. As part of the project, a survey of the existing use of standards in industry/academia has been undertaken. The survey quantified the level of standardisation in design, manufacturing, packaging and metrology in microsystems. The main results of the survey are summarised in this paper.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2586

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