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Measuring in three dimensions at the mesoscopic level.

Peggs, G N; Lewis, A; Leach, R K (2003) Measuring in three dimensions at the mesoscopic level. In: Proceedings of the ASPE Winter Topical Meeting - Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly., January 2003, Florida, USA.

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Abstract

As a first step along the path to develop metrology tools to operate in the mesoscopic regime, NPL has rapidly designed and manufactured a small CMM with a 50 x 50 x 50 mm measuring volume and significantly sub-micrometre volumetric uncertainty. It is one of a group of such instruments being developed in several European research institutes. An overview of this research is given before looking in detail at the NPL instrument. Current work at NPL on the development of probing systems for use at even smaller scales is then described. This work is targeted at the next generation of micro-scale CMMs.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Keywords: nano, metrology
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:16
URI: http://eprintspublications.npl.co.uk/id/eprint/2585

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