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Ultra-thin SiO2 on Si: II, issues in quantification of the oxide thickness.

Seah, M P; Spencer, S J (2002) Ultra-thin SiO2 on Si: II, issues in quantification of the oxide thickness. Surf. Interface Anal., 33. pp. 640-652.

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Abstract

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Item Type: Article
Subjects: Nanoscience
Nanoscience > Surface and Nanoanalysis
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2541

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