Leach, R K (2002) The importance of metrology and standardisation for micro-systems technology. In: 7th International Conference on Commercialisation of Micro and Nano Systems, 8-12 September 2002, Michigan, USA.

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Abstract

This paper discusses the standardisation and metrology issues that are required to enhance the commercial viability and quality of micro-components and micro-systems. It is asserted, as with macro-scale engineering and production, that the key to the successful manufacture of micro-scale devices is proper process control using various metrology tools, without which, useable yields will be low and failure modes poorly understood. Consequently, poor yields can lead to slow and often costly adoption of these devices. This paper discusses the dearth of instruments that have a measuring range that lies between the fledgling tools of nanotechnology (for example AFMs and their variants) and metrology tools of conventional manufacturing (for example CMMs) that are vital to the application of metrology at the micro-scale. Real-life examples are given to illustrate how metrology can be applied to enhance a micro-manufacturing process. The results of a recent comparison of commercial instruments are presented.

Item Type:	Conference or Workshop Item (UNSPECIFIED)
Keywords:	micro-systems, small CMM, metrology
Subjects:	Engineering Measurements Engineering Measurements > Dimensional
Last Modified:	02 Feb 2018 13:17
URI:	http://eprintspublications.npl.co.uk/id/eprint/2455

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