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Dynamic performance of a cantilever-based topography.

Chetwynd, D G*; Leach, R K (2002) Dynamic performance of a cantilever-based topography. In: 3rd Internation Conference of the European Society for Precision Engineering and Nanotechnology (euspen), 26-30 May 2002, Eindhoven, The Netherlands.

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Abstract

A variant of a previously-reported cantilever-based capacitive gauge for surface topography has been constructed as part of an evaluation of probing technologies. Somewhat like a scaled-up atomic force microscope, the probe allows good control of (low) contact forces at a sharp tip. Its relatively low sprung mass may allow use at higher scan speeds than conventional contact probes while maintaining fidelity. After a brief discussion of the design and dynamics of the probe operation, we discuss the results of frequency response tests on oscillating actuators and on sinusoidal surface artefacts. Encouragingly, there is no evidence of speed-related fidelity changes from causes such as surface friction.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Keywords: surface texture
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2301

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