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Sinusoidally modulated reference artefacts for calibration of surface texture measuring instruments.

Leach, R K; Garbutt, I; Cox, M G (2001) Sinusoidally modulated reference artefacts for calibration of surface texture measuring instruments. In: Proceedings of 2nd European Society for Precision Engineering and Nanotechnology (Euspen) International Conference, 27-31 May 2001, Turin, Italy.

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Abstract

As part of a collaborative project, sinusoidally modulated gratings with periods in the range of 0.8 to 25 µm have been developed at the National Physical Laboratory (NPL). The gratings are formed in photoresist-coated substrates by exposing them to an optical interference pattern. The photoresist gratings are then replicated into electroformed nickel. The gratings are measured using the NanoSurf IV instrument and the measured data are analysed using algorithms developed at NPL. The gratings can be used to calibrate surface texture measuring instruments.

Item Type: Conference or Workshop Item (UNSPECIFIED)
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/2002

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