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Production, measurement and analysis of sinusoidal artefacts for calibration of surface texture measuring instruments.

Leach, R K; Garbutt, I; Harris, P; Cox, M G (2001) Production, measurement and analysis of sinusoidal artefacts for calibration of surface texture measuring instruments. NPL Report. CBTLM 7

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Abstract

As part of a collaborative project, gratings with sinusoidal profiles and with periods in the range of 0.8 to 25 µm have been developed at the National Physical Laboratory (NPL). The gratings are formed in photoresist-coated substrates by exposing them to an optical interference pattern. The photoresist gratings are then replicated into electroformed nickel. The gratings are measured using the NanoSurf IV instrument and the measurement data are analysed using mathematical algorithms developed at NPL to extract the period and amplitude.

Item Type: Report/Guide (NPL Report)
NPL Report No.: CBTLM 7
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/1809

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