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Combined optical and x-ray interferometry for high precision dimensional metrology.

Basile, G*; Becker, P*; Bergamin, A*; Cavagnero, G*; Franks, A; Jackson, K; Kuetgens, U*; Mana, G*; Palmer, E W; Robbie, C J; Stedman, M; Stumpel, J*; Yacoot, A; Zosi, G* (2000) Combined optical and x-ray interferometry for high precision dimensional metrology. Proc. R. Soc. Lond. A, 456. pp. 701-729.

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Abstract

No abstract available

Item Type: Article
Keywords: calibration, nanometrology, optical interferometer, traceability, x-ray interferometer, x-ray optics
Subjects: Engineering Measurements
Engineering Measurements > Dimensional
Last Modified: 02 Feb 2018 13:17
URI: http://eprintspublications.npl.co.uk/id/eprint/1539

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